Method for programming and erasing an NROM cell

ABSTRACT

A nitride read only memory (NROM) cell can be programmed by applying a ramp voltage to the gate input, a constant voltage to one of the two source/drain regions, and a ground potential to the remaining source/drain region. In order to erase the NROM cell, a constant voltage is coupled to the gate input. A constant positive current is input to one of the source/drain regions. The remaining source/drain region is either allowed to float, is coupled to a ground potential, or is coupled to the first source/drain region.

RELATED APPLICATIONS

This application is a Continuation of U.S. application Ser. No.10/636,173 filed Aug. 7, 2003, now U.S. Pat. No. 6,873,550

TECHNICAL FIELD OF THE INVENTION

The present invention relates generally to memory devices and inparticular the present invention relates to programming and erasingnitride read only memory cells.

BACKGROUND OF THE INVENTION

Memory devices are typically provided as internal storage areas in thecomputer. The term memory identifies data storage that comes in the formof integrated circuit chips. In general, memory devices contain an arrayof memory cells for storing data, and row and column decoder circuitscoupled to the array of memory cells for accessing the array of memorycells in response to an external address.

There are several different types of memory such as random access memory(RAM) and read only memory (ROM). RAM is typically used as main memoryin a computer environment. One can repeatedly read data from and writedata into RAM. Most RAM is volatile, which means that it requires asteady flow of electricity to maintain its contents. When the power isturned off, the data in RAM is lost.

This is in contrast to ROM that generally only permits the user to readdata already stored in the ROM but the ROM retains data after power isremoved (i.e., non-volatile). Computers almost always contain a smallamount of ROM that holds instructions for starting up the computer.Unlike RAM, ROM generally cannot be written to in routine operation.

Yet another type of non-volatile memory is flash memory. A flash memoryis a type of EEPROM that can be erased and reprogrammed in blocksinstead of one byte at a time. Many modern PCs have their BIOS stored ona flash memory chip so that it can easily be updated if necessary. Flashmemory is also popular in modems because it enables the modemmanufacturer to support new protocols as they become standardized.

Another type of non-volatile memory is a nitride read only memory(NROM). NROM has some of the characteristics of flash memory but doesnot require the special fabrication processes of flash memory. NROM canbe implemented using a standard CMOS process.

Because of NROM's CMOS process, the NROM can be embedded into otherarchitectures, such as microcontrollers, that also use the CMOS process.However, one problem with embedding the NROM is that an NROM memoryarray, susceptible for embedding, requires high current consumption forprogram and erase.

For the reasons stated above, and for other reasons stated below whichwill become apparent to those skilled in the art upon reading andunderstanding the present specification, there is a need in the art fora way to erase NROM arrays without being over-erased.

SUMMARY

The above-mentioned problems with programming and erasing NROM arraysand other problems are addressed by the present invention and will beunderstood by reading and studying the following specification.

The various embodiments relate to programming and erasing NROM cells. Inone embodiment, these cells are embedded in CMOS integrated circuits.One embodiment for programming an NROM cell includes applying a rampvoltage to a gate input. A constant voltage is applied to one of the twosource/drain regions. The remaining source/drain region is coupled toground potential.

One embodiment for erasing an NROM cell includes applying a constantvoltage to the gate input. A constant positive current is sourced to oneof the source/drain regions. The remaining source/drain region isallowed to either float, coupled to ground, or is coupled to the firstsource/drain region, depending on the embodiment.

In another embodiment, the erase operation includes applying a constantvoltage to one of the source/drain regions. A negatively ramped voltageis coupled to the gate input and the remaining source/drain region iscoupled to ground, allowed to float, or coupled to the firstsource/drain region, depending on the embodiment.

Further embodiments of the invention include methods and apparatus ofvarying scope.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and B show diagrams of an NROM memory cell of the presentinvention.

FIG. 2 shows a circuit equivalent for the program operation in the NROMmemory cell in accordance with FIG. 1.

FIG. 3 shows a flow chart of a method for programming an NROM memorycell in accordance with one embodiment of the present invention.

FIG. 4 shows a flow chart of a method for erasing an NROM memory cell inaccordance with one embodiment of the present invention.

FIG. 5 shows a flow chart of a method for erasing an NROM memory cell inaccordance with an alternate embodiment of the present invention.

FIG. 6 shows a block diagram of one embodiment of a system of thepresent invention having an embedded NROM array.

DETAILED DESCRIPTION

In the following detailed description of the invention, reference ismade to the accompanying drawings that form a part hereof, and in whichis shown, by way of illustration, specific embodiments in which theinvention may be practiced. In the drawings, like numerals describesubstantially similar components throughout the several views. Theseembodiments are described in sufficient detail to enable those skilledin the art to practice the invention. Other embodiments may be utilizedand structural, logical, and electrical changes may be made withoutdeparting from the scope of the present invention. The followingdetailed description is, therefore, not to be taken in a limiting sense,and the scope of the present invention is defined only by the appendedclaims and equivalents thereof.

FIGS. 1A and 1B illustrate a diagram of an NROM memory cell of thepresent invention. This cell is comprised of a control gate 100 formedon top of an oxide layer 101. Below the oxide layer is a layer ofnitride 103 upon which the charge is stored for the various states ofthe cell. In one embodiment, the cell has areas 105 and 106 for storingtwo bits of data on the nitride 103. The nitride 103 can be patternedeither in isolated patches matching the individual cells (as in FIG. 1A)or as a continuous blanket covering a whole unit of memory array (as inFIG. 1B).

Two source/drain regions 109 and 111 are at either end of the gate 100.The source/drain regions 109 and 111 are connected by a channel area 110between the two regions 109 and 111. The function of each source/drainregion 109 or 111 (i.e., whether source or drain) depends upon which bitarea 105 or 106 is being read or written. For example, in a readoperation, if the carrier is input at the left side source/drain region111 and output from the right side region 109, the left side is thesource 111 and the right side is the drain 109 and the data bit chargeis stored on the nitride 103 at the source end 111 for bit area 106.

FIG. 2 illustrates a circuit that models the NROM memory cell of FIG. 1.This circuit is comprised of a capacitor 201 coupled through a node 203to a resistor 202. This model will be referred to subsequently withreference to the programming method of FIG. 3.

Standard long-channel NROM cells for double-bit storage are inherentlyinsensitive to over-erasure. The threshold voltage for such a cell in anerased state is kept at its “neutral” value by the mid-channel regionaway from either source/drain region, which has no holes trapped in thenitride dielectric above.

A newer type of short-channel NROM cells forgoes the double-bit storagein exchange for programming at a lower voltage. Such cell structure andoperation are particularly well suited for embedded memory applications.These short-channel NROM cells can inject hot holes in the mid-channelregion during an erase operation and thus become sensitive toover-erasure like traditional stack-gate flash memory. The methods ofthe present invention are applicable to both long channel (double-bit)and short channel (single-bit) architectures.

One problem with embedding an NROM memory array in another CMOS deviceis that the NROM memory array typically requires 10V and a highprogramming current. This could potentially damage the other circuitryin the device in which the NROM is embedded.

FIGS. 3–5, as discussed subsequently, illustrate the various methods forprogramming and erasing of the present invention. The order of the stepsis for illustration purposes only. It is preferred that all voltages beapplied and developed simultaneously. However, alternate embodiments mayuse one or more sequential steps in applying the voltages

FIG. 3 illustrates a flow chart of a method for programming an NROMmemory array in accordance with one embodiment of the present invention.This method does not require either a high constant voltage or a highprogramming current.

The source region is at ground potential 301 when a voltage in the rangeof 3.0 to 6V is applied to the drain region 305. Alternate embodimentsuse other voltages on these connections. For example, in one embodiment,the source may have a reverse source to body voltage applied.

A linear ramp voltage is applied to the control gate of the cell 307. Inone embodiment, this voltage starts in the range of 0 to 6V and goes upto 4 to 12V for a time in the range of 0.001–1 millisecond. In oneembodiment, the ramp voltage starts at 5V and goes up to 10V. Alternateembodiments use other ranges for the voltages and the time.

Using the method of FIG. 3 to the circuit of FIG. 2, the ramp voltage isapplied to the capacitor 201. The voltage at the node 203 ramps up to acertain point then levels off. This point is where the displacementcurrent of the capacitor 201 equals the conduction current of theresistor 202. This constant voltage maintains the constant current forprogramming the memory array while the input voltage ramps up.

FIG. 4 illustrates a flow chart of a method for erasing an NROM memoryarray in accordance with one embodiment of the present invention. Thismethod applies a constant gate voltage 401 in the range of 0 to −12V. Inone embodiment, the gate voltage is approximately −7V.

One of the source/drain regions can remain floating, grounded, or tiedto the other source/drain region 403. The other drain/source region hasa constant positive current applied 405.

The injected constant current is in the range of gate induced drainleakage (GIDL) of 0.1 nA to 10 μA per cell in the NROM array. Thesevoltages, in one embodiment, are applied for a time in the range of 1 μsto 1 second. Alternate embodiments use other ranges of time.

In an alternate embodiment, the voltage that the forced current developson the drain/source region 405 can be monitored. The erase operation canthen be ended when this voltage reaches a predetermined voltage. Thisvoltage threshold can be set to any value in correlation with thedynamics of the erase operation for the NROM cells.

FIG. 5 illustrates a flow chart of an alternate embodiment method of thepresent invention for erasing an NROM memory array. This method appliesa constant voltage on one of the source/drain regions 501. The otherdrain/source region remains floating, grounded, or biased with the samevoltage as the first source/drain region 503. The gate has a negativelyramped voltage applied 505. In one embodiment, this voltage is in therange of 0 to −4V and goes down to −7 to −12.

By ramping the gate voltage, the erase method of FIG. 5 can perform anerase operation with less drain current consumption than a prior arterase operation. This can reduce the overall power requirements of thedevice into which the NROM array is embedded.

In the methods of FIGS. 3–5, the erase operation would proceed at a moreconstant pace than in a prior art erase operation with constantvoltages. Additionally, the current absorbed by the array would beuniform in time and lower for the methods of the present invention thanat the beginning of an erase pulse in the prior art method. The GIDL andthe rate of charge trapping in the oxide-nitride-oxide dielectric remainconstant throughout the time of the erase operation.

FIG. 6 illustrates a block diagram of a CMOS system in which an NROMarray is embedded. This system is comprised of a microprocessor 601coupled to the NROM array 602 over CONTROL, ADDRESS, and DATA buses.These components 601 and 602 are incorporated onto a single integratedcircuit die. Alternate embodiments may add additional components such asinput/output circuitry and other types of memory.

CONCLUSION

The methods of the present invention for programming and erasing anembedded NROM array operate effectively on both long-channel andshort-channel cells. These methods provide a means for programming anderasing while maintaining a constant programming and erase current atlower voltages. This decreases power consumption and increases thereliability, thus decreasing the failure rate, of the device.

Although specific embodiments have been illustrated and describedherein, it will be appreciated by those of ordinary skill in the artthat any arrangement that is calculated to achieve the same purpose maybe substituted for the specific embodiments shown. Many adaptations ofthe invention will be apparent to those of ordinary skill in the art.Accordingly, this application is intended to cover any adaptations orvariations of the invention. It is manifestly intended that thisinvention be limited only by the following claims and equivalentsthereof.

1. A method for programming a nitride read only memory (NROM) cell in aCMOS device, the NROM cell having a gate input and two source/drainregions, the method comprising: applying a ramp voltage to the gateinput; applying a constant voltage to one of the two source/drainregions; and applying a ground potential to the remaining source/drainregion.
 2. The method of claim 1 wherein the source/drain region towhich the constant voltage is applied is acting as a drain region andthe source/drain region to which the ground potential is applied isacting as a source region.
 3. The method of claim 1 wherein the rampvoltage starts in a range of 0 to 6V and ends in a range of 4 to 12V. 4.The method of claim 1 wherein the ramp voltage has a time period in arange of 1 microsecond to 1 millisecond from start to end.
 5. The methodof claim 1 wherein the ramp voltage starts at 5V and goes to 10V.
 6. Themethod of claim 1 wherein the constant voltage is in a range of 3.5 to6V.
 7. A CMOS device having a nitride read only memory (NROM) cell, theNROM cell comprising: a gate input coupled to a ramp voltage; a firstsource/drain region coupled to a constant voltage; and a secondsource/drain region coupled to a ground potential.
 8. The CMOS device ofclaim 7 and further comprising an oxide-nitride-oxide region between thefirst and second source/drain regions that can hold a data bit on eachend of the oxide-nitride-oxide region.
 9. The CMOS device of claim 7 andfurther comprising an oxide-nitride-oxide region between the first andsecond source/drain regions that can hold a single data bit.
 10. TheCMOS device of claim 7 wherein the constant voltage is in a range of 3.5to 6V and the ramp voltage starts in a range of 0 to 6V and ends in arange of 4 to 12V over a time period in a range of 1 microsecond to 1millisecond.
 11. A method for performing an erase operation in a CMOSmemory device comprising an NROM array that has a nitride read onlymemory (NROM) cell, the NROM cell having a gate input and twosource/drain regions, the method comprising: applying a constant voltageto the gate input; applying a constant positive current into a first ofthe source/drain regions; and floating the remaining source/drainregion.
 12. A method for erasing a nitride read only memory (NROM) cellin a CMOS memory system comprising a processor coupled to an NROM arraythat comprises the NROM cell, the NROM cell having a gate input and twosource/drain regions, the method comprising: applying a constant voltageto the gate input; applying a constant positive current into a first ofthe source/drain regions; and applying a ground potential to theremaining source/drain region.
 13. The method of claim 12 and furtherincluding: monitoring the first source/drain region for a predeterminedvoltage level; and ending the erase operation when the predeterminedvoltage level is reached.
 14. The method of claim 12 wherein theconstant gate voltage is in a range of 0 to −12V, the constant positivecurrent is in a range of 0.1 nA to 10 μA per cell, and the eraseoperation has a duration in a range of 1 μs to 1 second.
 15. A methodfor erasing a nitride read only memory (NROM) cell in a CMOS memorydevice comprising a processor coupled to an NROM array that comprisesthe NROM cell, the NROM cell having a gate input and two source/drainregions, the method comprising: applying a constant voltage to the gateinput; applying a constant positive current into a first source/drainregion; and coupling the remaining source/drain region to the firstsource/drain region.
 16. The method of claim 15 wherein constant gatevoltage is in a range of 0 to −12V, the constant positive current is ina range of 0.1 nA to 10 μA per cell, and the erase operation has aduration in a range of 1 μs to 1 second.
 17. A method for erasing anitride read only memory (NROM) cell in a CMOS memory system comprisinga microprocessor coupled to an NROM array that comprises the NROM cell,the NROM cell having a gate input and two source/drain regions, themethod comprising: applying a constant voltage to a first of thesource/drain regions; applying a negatively ramped voltage to the gateinput; and allowing the remaining source/drain region to float.
 18. Themethod of claim 17 wherein the constant voltage is in a range of 3.5 to6V and the negatively ramped voltage starts in a range of 0 to −4V andends in a range of −7 to −12V over a time period in a range of 1microsecond to 1 millisecond.
 19. A method for erasing a nitride readonly memory (NROM) cell in a CMOS memory device comprising amicroprocessor coupled to an NROM array that comprises the NROM cell,the NROM cell having a gate input and two source/drain regions, themethod comprising: applying a constant voltage to a first of thesource/drain regions; applying a negatively ramped voltage to the gateinput; and coupling the remaining source/drain region to the firstsource/drain region.
 20. A method for erasing a nitride read only memory(NROM) cell in a CMOS memory device comprising an NROM array thatcomprises the NROM cell, the NROM cell having a gate input and twosource/drain regions, the method comprising: applying a constant voltageto a first of the source/drain regions; applying a negatively rampedvoltage to the gate input; and applying a ground potential to theremaining source/drain region.